| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring jig, electrical property measuring method, and resonator which can measure electrical properties of thin-layer dielectrics formed on a conductive material with high precision. SOLUTION: The measuring jig comprises a pair of parallel conductive plates 14a and 14b located in nearly parallel with each other, a center conductive plate 15 located between the parallel conductive plates 14a and 14b to be parallel thereto, and a conductor supporting column 12 supporting a pair of the parallel conductive plates 14a and 14b at a certain interval. COPYRIGHT: (C)2005,JPO&NCIPI
|
