METHOD AND APPARATUS FOR RAPID SAMPLE PREPARATION IN A FOCUSED ION BEAM MICROSCOPE

摘要

A coupon (100) for preparing a TEM sample holder (170) comprises a sheet of material (120) that includes a TEM sample holder form (170). There is at least one section of the sheet (120) connecting the TEM sample holder form (170) to other portions of the sheet (120). A TEM sample holder (170) is formed by cutting the TEM sample holder form (170) from the coupon in a press. The cutting joins the tip point (160) of a nano-manipulator probe tip (150) with the formed TEM sample holder (170). The tip point (160) of the probe (150) has a sample (140) attached for inspection in a TEM.