COMBINATION CATHETER DEVICES, METHODS, AND SYSTEMS

摘要

A combination catheter method, system, and device are provided having a capacitive-micromachined ultrasound transducer ("cMUT") and a sensor fabricated on the same substrate. A substrate is provided, and various layers of materials are deposited onto the substrate and patterned to form a cMUT and one or more sensors. Other embodiments are also claimed and described.