| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a grinding device by which a film formed to a substrate during grinding can be prevented from being peeled off and in which it is not necessary to select process conditions linked to the increase of a process time during grinding. <P>SOLUTION: The grinding device, which is provided with a grinding table 1 having a grinding face and a substrate holder 5 for holding the substrate 4, grinds the substrate 4 by bringing the substrate 4 into sliding contact with the grinding face. A monitoring controller 30 is provided to the grinding device. The monitoring controller 30 is composed of a monitoring part 31 for monitoring a grinding state of a face to be ground of the substrate 4 and a control part 32 for changing grinding conditions on the basis of the grinding state of the face to be ground detected by the monitoring part 31. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
