| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a long-term stable process by preventing breakage of a dielectric window and its peripheral members. <P>SOLUTION: This processor applying plasma treatment to a substrate to be processed by a microwave supplied by a microwave generator has the dielectric window transmitting the microwave supplied by the microwave generator to a treatment chamber and functioning as a partition of the treatment chamber and a sealing part sealing the dielectric window and the treatment chamber. The dielectric window has a step on a side facing the substrate to be processed. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
