发明名称 PRODUCTION PLANNING SUPPORT SYSTEM, PRODUCTION PLANNING METHOD, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a technique that can shorten a cycle time by accumulating, evaluating and verifying lot assignment rules and applying optimum assignment rules, in production planning. <P>SOLUTION: A production planning support system has a production management information part 14 for storing information on production management (product delivery dates, progress, costs, processes and the like), a device management information part 15 for storing information on device management (processing device states, processing conditions and the like), and an operation part (hit rate operation part 19) for calculating a degree of matching (hit rate) between the information in the production management information part 14 or/and device management information part 15, assignment information obtained from assignment rules (information in a processing candidate list storage part 161), and information about actual instructions by persons for processing devices and processing sequences (information in a processing instruction result storage part 171). <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2005135117(A) 申请公布日期 2005.05.26
申请号 JP20030369754 申请日期 2003.10.30
申请人 TRECENTI TECHNOLOGIES INC 发明人 TAKEHARA NAOKI;OKABE TSUTOMU
分类号 G05B19/418;G06Q50/00;G06Q50/04;(IPC1-7):G05B19/418;G06F17/60 主分类号 G05B19/418
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