| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to adjust the optical axes of an optical waveguide and a light emitting and receiving section with high accuracy without making electrical connector to the light emitting and receiving element in an optical waveguide module and its manufacturing method. SOLUTION: The optical waveguide module 1 has the light emitting and receiving element 2 and an optical waveguide plate 3 equipped with a core 4 for signals, wherein the end surface of the core 3 for signals formed on its end surface 30 is opposed to the light emitting and receiving section 21 of the light emitting and receiving element 2 to optically couple the light emitting and receiving element 2 and the optical waveguide plate 3. The optical waveguide plate 3 is equipped with a core 5 for position adjustment and the end surface of the core 5 for position adjustment apart by a prescribed distance from the end surface of the core 4 for signals is arranged on the end surface 30. The light emitting and receiving element 2 is equipped with an alignment mark 6 in the position apart by the prescribed distance from the light emitting and receiving section 21. At the time of manufacturing the optical waveguide module 1, the alignment mark 6 is irradiated with light and while the reflected light is measured at another end P through the core 4 for position adjustment, the position of the light emitting and receiving element 2 and the optical waveguide plate 3 can be finely adjusted based on the change in its light intensity. COPYRIGHT: (C)2005,JPO&NCIPI |
