An apparatus and method for manufacturing integrated circuits, microelectromechanical system (mems) devices and nanofilters

摘要

A wafer (11) having a patterned surface (12) for stamping nanoparticles (5) in a solution onto a substrate (6) during the manufacture of devices such as integrated circuits, microelectromechanical system (mems) devices and nanofilters.A method of manufacturing the wafer (11) and components manufactured by the process of stamping nanoparticles (5) onto a substrate (6).