| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method capable of manufacturing, more efficiently than conventionally, a solar battery in which a region with a surface electrode provided on the front face side of a substrate is formed to be flat and parts other than the region are formed to be uneven. <P>SOLUTION: The method of manufacturing a solar battery includes at least a step of forming a dielectric film on the front face side of a semiconductor substrate having a photoelectric conversion function, a step of forming a coating layer on the dielectric film positioned in an electrode formation region, a step of etching the semiconductor substrate using the dielectric film as a mask, and a step of removing the dielectric film from the semiconductor substrate. Alternately, the method includes at least a step of forming the dielectric film on the surface of the semiconductor substrate having the photoelectric conversion function, a step of removing the dielectric film positioned in the electrode formation region, a step of etching the semiconductor substrate using the dielectric film as a mask, and a step of removing the dielectric film from the semiconductor substrate. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
