发明名称 Semiconductor device and its manufacturing method, and semiconductor device manufacturing system
摘要 A method of manufacturing a semiconductor device is provided including depressing a bonding tool having a concave portion toward a wiring board with a semiconductor chip disposed within the concave portion, pressing the semiconductor chip with a bottom face of the concave portion, fluidizing a resin provided between the semiconductor chip and the wiring board, and filling a lateral space proximate the semiconductor chip within the concave portion with the resin, and curing the resin.
申请公布号 US2005112803(A1) 申请公布日期 2005.05.26
申请号 US20040973991 申请日期 2004.10.26
申请人 OGATA YOSHIHARU 发明人 OGATA YOSHIHARU
分类号 H01L23/12;H01L21/56;H01L21/60;H01L21/98;H01L25/065;(IPC1-7):H01L21/82;H01L23/495 主分类号 H01L23/12
代理机构 代理人
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