发明名称 Multiple sensor system
摘要 An extension unit provided adjacent to an amp unit comprises a measurement data accumulation memory, a measurement data acquiring part for acquiring measurement data coming through a transmission line and accumulating it in the above memory, a data analyzing part for analyzing an accumulated series of measurement data according to predetermined algorithm, a determining part for determining a data analyzed result, and an output part for outputting a control signal corresponding to a determined result to the outside. A plurality of process programs in which measurement algorithm is segmentalized are incorporated in the extension unit and a process program is selected according to a command from a personal computer and the selected process program is performed in a predetermined order.
申请公布号 US2005110000(A1) 申请公布日期 2005.05.26
申请号 US20040942083 申请日期 2004.09.16
申请人 发明人 IIDA YUSUKE;INOUE YUICHI;ISHIKAWA NOBUHARU;HOSODA TORU
分类号 G01B11/00;G06F17/00;G06F17/40;H01L29/00;(IPC1-7):H01L29/00 主分类号 G01B11/00
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