发明名称 |
Apparatus for generating inductively-coupled plasma and antenna coil structure thereof for generating inductive electric fields |
摘要 |
Disclosed is an apparatus for generating inductively-coupled plasma (ICP). The ICP generation apparatus includes a source region where an ICP antenna coil is mounted, the ICP antenna coil generating inductive electric fields for generating plasma and having a serially-connected concentric circle-type structure, the total number of windings of the ICP antenna coil being greater than 2, the ICP antenna coil having a structure in which at least one circular winging closest to the center of the concentric circle is wound in a direction opposite to that of the other windings; a sealed chamber in which a predetermined process is performed on a sample placed on a chuck therein through a reaction between plasma ions and reactive radicals; and a radio frequency (RF) power supply for providing RF electric power of a predetermined frequency to the ICP antenna coil in the source region.
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申请公布号 |
US2005109462(A1) |
申请公布日期 |
2005.05.26 |
申请号 |
US20040909467 |
申请日期 |
2004.08.02 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
LEE YOUNG-DONG;SHIN JAI-KWANG;OH JAE-JOON;KIM SEONG-GU |
分类号 |
H01L21/02;C23C16/00;C23F1/00;H01J37/32;H01L21/306;(IPC1-7):C23F1/00 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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