| 摘要 |
PROBLEM TO BE SOLVED: To provide an actuator enabling low-voltage drive with large deflection angle (amplitude). SOLUTION: This two-degree-of-freedom oscillation system of actuator has first mass parts 1, 11, a second mass part 2, a support 3, at least one pair of first elastic coupling parts 4 which couple the first mass parts 1, 11 with the support 3 so that the first mass parts 1, 11 may be rotatable to the support 3, and at least one pair of second elastic coupling parts 5, 5 which couple the first mass parts 1, 11 with the second mass part 2 so that the second mass part 2 may be rotatable to the first mass parts 1, 11. The first mass parts 1, 11 are driven by applying AC voltage, and the second mass part 2 rotates accompanying it. The first mass part 1 is provided on the side of one end of the second mass part 2 via the second mass part 2, and the first mass part 1 is provided on the side of the other end of the second mass part 2. COPYRIGHT: (C)2005,JPO&NCIPI
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