| 摘要 |
PROBLEM TO BE SOLVED: To realize a method and an instrument for measuring a gas flow rate capable of measuring simply and precisely the gas flow rate in a low-boiling point side of a mixed gas of two kinds of gases different in boiling points. SOLUTION: This instrument 1 for measuring the gas flow rate is provided with a condensing vessel 3 for condensing the mixed gas of the two kinds of gases different in the boiling points, and a flowmeter 5 for measuring the flow rate of the mixed gas, and is constituted to calculate the gas flow rate in the low-boiling point side by measuring a flow rate value by the flowmeter 5, after the mixed gas is condensed in the condensing vessel 3 and after a gas flow rate in a high-boiling point side is known. COPYRIGHT: (C)2005,JPO&NCIPI
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