SEMICONDUCTOR TYPE GAS SENSOR, AND METHOD FOR MONITORING GAS BY USE OF SEMICONDUCTOR TYPE GAS SENSOR

摘要

PROBLEM TO BE SOLVED: To improve the selectivity for gas in monitoring a gas by use of a semiconductor type gas sensor. SOLUTION: The method for monitoring a gas to be detected by use of the semiconductor type gas sensor including a resistor comprises the step of keeping the temperature of the resistor at a first temperature for a predetermined time; the first measurement step of measuring the value of electric resistance of the resistor in the gas at the first temperature; the step of changing the temperature of the resister from the first temperature to a second temperature, and keeping it at the second temperature for a predetermined time; the second measurement step of measuring the value of electric resistance of the resister in the gas to be detected at the second temperature; the step of changing the temperature of the resister from the second temperature to a third temperature, and keeping it at the third temperature for a predetermined time; the third measurement step of measuring the value of electric resistance of the register in the gas to be detected at the third temperature; and the step of determining whether a gas of detecting object is contained in the gas to be detected or not based on the values of electric resistance obtained by the first, second and third measurement steps. COPYRIGHT: (C)2005,JPO&NCIPI