| 摘要 |
PROBLEM TO BE SOLVED: To prevent excess contact load onto a surface to be measured, to prevent the formation of flaws in the surface to be measured, and to heighten a following property to the surface to be measured by attenuating probe vibrations. SOLUTION: This shape measuring apparatus is provided with a holder 2 for holding a contact probe 1 in such a way as to move in one direction; a three-directionally movable member 11 to which the holder 2 is mounted; and a displacement meter 2 mounted to the movable member for measuring the amount of displacement of the contact probe 1. At scanning with the probe 1 while maintaining a constant measuring pressure, a first permanent magnet 5 is provided for the outer circumference of the probe 1, a second permanent magnet 6 is provided for the inner circumference of the holder 2, and magnetic attraction acting in a shearing direction of magnetic flux generated by deviations in the relative locational relation between the probe 1 and the holder 2 is used as a spring force. The spring force is generated by the amount of force acquired by subtracting the pressing force of the size of the spring force pressing to the surface to be measured from the self-weight of the contact probe 1. COPYRIGHT: (C)2005,JPO&NCIPI
|
