| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a planar motor in which a vibration in the pitching direction of a forcer at accelerating or decelerating time can be abolished. <P>SOLUTION: The planar motor includes a platen 111 having teeth 101 formed at a predetermined pitch along an X-axis direction and a Y-axis direction, and the forcer 112 containing a floating means 113 to the platen 111 and a plurality of movable elements. The movable element has a plurality of X-axis movable elements 135, 136 each for generating a thrust force in the X-axis direction, and a plurality of Y-axis movable elements 131, 132 each for generating a thrust force in the Y-axis direction. The planar motor further includes a pitching detection means 14 having a light source 141 fixed to the forcer 112 to irradiate a light toward the platen 111 side and a plurality of photodetecting means 142 fixed to the forcer 112 side to detect the light reflected from the platen 111 side, and a control means for controlling the attitude of the forcer 112 in the pitching direction based on the detection signals of the plurality of the photodetecting means 142. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
