| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent power from being consumed in waste without shortening the lifetime of a luminaire in a working device requiring illumination for detecting a region to be worked. <P>SOLUTION: In the working device 1 having an aligning means 7 for detecting a work region by imaging a wafer W retained by a chuck table 6; the aligning means 7 comprises an optical system 70, an imaging section 71 for converting light captured by the optical system 70 to an electric signal, and the luminaire 72 for irradiating the work region of a wafer W with light. The luminaire 72 is connected to a voltage value adjusting means 74 for adjusting the value of voltage to be supplied to the luminaire 72. The voltage value adjusting means 74 has a switch 741 for switching voltage supplied to the luminaire to a voltage value when using the luminaire and a voltage value in standby. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
