HIGH FREQUENCY CELL FOR PRODUCING A PLASMA JET FORMED BY MAGNETIC FIELDS, AND METHOD FOR IRRADIATING A SURFACE

摘要

The invention relates to a high frequency plasma jet source (23) comprising a plasma chamber (6) for a plasma, electrical means for igniting and obtaining a plasma, and an outlet comprising an extraction grid (5) for extracting a plasma jet (3) from the plasma chamber (6). According to the invention, a device is provided for producing a magnetic field (7, 8) by which means the plasma jet (3) can be diverged. The invention also relates to a vacuum chamber (22) comprising a housing (21), a surface (K) to be irradiated, and a high frequency plasma jet source (23) by which means a divergent plasma jet (3) can be produced. The invention further relates to a method for irradiating a surface by means of a high frequency plasma jet source (23), using a divergent plasma jet (3).