| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a matrix for a microlens array, which enables the manufacture of the matrix for the microlens array, composed of a unit cell with curvature controlled with an extremely high degree of accuracy, on a conventionally unrealizable large-area substrate by solving the problem of roughening of a substrate surface, as a defect in laser ablation. <P>SOLUTION: In this manufacturing method for the matrix for forming an optical member provided with the many microlens arrays, a photomask 2, where a mask pattern is formed, is arranged above the substrate 1; a laser beam 3 is applied via the photomask 2, so that a desired three-dimensional pattern depending on the mask pattern can be formed on the substrate 1; in this case, the spot size of the laser beam 3 is increased so that the laser beam can pass through the photomask 2; and subsequently, the spot size of the laser beam 3 is reduced for the application of the laser beam 1 to the surface of the substrate 1, so that the surface of the substrate can be partially evaporated. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
