| 摘要 |
PROBLEM TO BE SOLVED: To stick a pre-cut tape on a belt-like peelable substrate to a plate-shaped member by making the member and the outer edge of the tape coincident with each other, by preventing the meandering of the peelable substrate when sticking the tape to the member. SOLUTION: The sticking device is provided with a support roller 11 which supports a belt-like material A1 in which a protective tape T1 is stuck to the peelable substrate B, a sticking means 12 which sticks the protective tape T1 to a semiconductor wafer W by peeling the tape T1 from the belt-like material A1 fed from the support roller 11, and a feeding device 17 which imparts a feeding force to the belt-like material A1. The feeding device 17 comprises a feed roller 95 and a pinch roller 96. The both sides of the pinch roller 96 in the axial direction are supported by arms 105 and biased toward the feed roller 95 by means of springs 108. The front ends of spring pressure adjusting bolts 109 are brought into contact with the arms 105, and the pressures on both sides of the pinch roller 96 and feed roller 95 in the axial direction are adjusted equally to each other by moving the bolts 109 forward or backward. COPYRIGHT: (C)2005,JPO&NCIPI |
