| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a pump which can maintain a discharging performance by exhausting a bubble even if the bubble stays in a pump chamber. <P>SOLUTION: The pump 10 includes a main pump chamber 27 in which a volume can be changed by driving a diaphragm 60, an inlet flow path in which a working fluid flows into the main pump chamber 27, an outlet flow path in which the working fluid flows out of the main pump chamber 27, and check valves 41, 42 which open and close at least the inlet flow path. A synthetic inertance value of the inlet flow path side is set smaller than an inertance value of the outlet flow path side. The pump 10 further includes a bubble discharging means for discharging the bubble staying in the main pump chamber 27. Thus, even if the bubble stays in the main pump chamber 27, the bubble is discharged by the bubble discharging means, and the discharging performance can be maintained. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
