| 摘要 |
PROBLEM TO BE SOLVED: To provide a fine machining method using an FIB, capable of performing modeling, without the occurrence of focal point blurs, even if the height dimension becomes larger, in a structure formation, where fine machining is required, and to provide an apparatus for executing this. SOLUTION: A correction method for a machining focus position employs an FIB-processing device having a monitoring SEM8, arranges an ion lens-barrel so as to irradiate the FIB from the vertical direction to the surface of a testpiece on a stage 7, also observes a change of the testpiece in modeling by arranging the SEM lens-barrel 8 so as to have electronic beams from the vertical direction irradiated to the FIB, and then corrects the focal position of the ion beam 2, by sending a control signal to an ion optical system 3 for displacing the stage 7 in Z direction by an amount of movement, away from the focal position of ion beams, when the position of a machining portion moves away from the focal position of the ion beams. COPYRIGHT: (C)2005,JPO&NCIPI
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