摘要 |
PROBLEM TO BE SOLVED: To provide a capacitance type distance measuring instrument for sensitively detecting a measuring object at a long distance, having high measurement resolution, and having a wide measurable distance range. SOLUTION: This capacitance type distance measuring instrument is equipped with nine capacitance type distance sensors S11 to S 33 disposed in a matrix form. The distance sensors S11 to S 33 are each equipped with a transmission electrode 111 and a reception electrode 112. A sensor selection part 120 selects a plurality of capacitance type distance sensors adjoining each other to mutually together connect the transmission electrodes 111 and the reception electrodes 112 of the selected distance sensors. This arbitrarily changes the substantial areas of the electrodes 111 and 112. When measurement sensitivity is desirably increased, the substantial areas of the electrodes 111 and 112 are set to be smaller. When measurement resolution is desirably increased or the measurable distance range is desirably widened, the substantial areas of the electrodes 111 and 112 are set to be smaller. COPYRIGHT: (C)2005,JPO&NCIPI
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