发明名称 Semiconductor device and manufacturing method thereof
摘要 The semiconductor device fabrication method of the present invention includes forming metal wirings on a semiconductor substrate, forming a first blocking layer on the semiconductor substrate and the metal wiring, forming a first FSG on the first blocking layer, forming a second blocking layer on the first FSG, forming a second FSG on the second blocking layer, and forming a protection layer on the second FSG.
申请公布号 US2005112867(A1) 申请公布日期 2005.05.26
申请号 US20040998221 申请日期 2004.11.26
申请人 ANAM SEMICONDUCTOR INC. 发明人 KIM RAE S.
分类号 H01L21/316;H01L21/768;H01L23/532;(IPC1-7):H01L21/44;H01L21/476;H01L23/48;H01L23/52;H01L29/40 主分类号 H01L21/316
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