FUNCTIONAL WATER PRODUCTION APPARATUS EQUIPPED WITH EXHAUST GAS TREATMENT FUNCTION

摘要

PROBLEM TO BE SOLVED: To provide a functional water production apparatus capable of detecting leakage of oxygen-based gas or hydrogen gas into a clean room and stopping formation of these gases.

SOLUTION: This functional water production apparatus is provided with a surplus gas treating means forming water by introducing undissolved oxygen-based gas and hydrogen gas formed in an electrolysis device into pure water to cause a chemical reaction; a temperature sensor measuring temperature of the surplus gas treating means; and a power source breaker breaking power feed from a DC source device to the electrolysis device, when the temperature measured by the temperature sensor is lower than a given temperature. This configuration breaks power feed to the electrolysis device in case of hydrogen leakage to stop generation of hydrogen, which prevents variation of the composition of gas in the clean room due to leakage of hydrogen gas or danger of explosion.

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