| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To miniaturize a vacuum chamber storing a beltlike substrate conveying mechanism and the whole of a vacuum device by the miniaturization of the beltlike substrate conveying mechanism at the time of producing a solar battery on a beltlike substrate mainly using the vacuum device, thereby to use compact and inexpensive component parts in the ones around the vacuum device, to suppress the cost of the whole of a solar battery production device including the vacuum device, i.e., equipment depreciation cost, and to suppress the cost of the solar battery as a result. <P>SOLUTION: A beltlike substrate conveying device of a spiral type carrying system is used. The treatment face in a beltlike substrate always turns to a discharge space side, thus continuous treatment can be performed, and the length of a carrying mechanism can be remarkably shortened compared with the length of the substrate in the part where the beltlike substrate is exposed to the discharge space. Further, the volume of a vacuum chamber can remarkably be miniaturized. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
