摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a chemical filter with a less pressure loss, a large gas adsorption capacity and a large impurity component removal capacity. <P>SOLUTION: This chemical filter is provided with a sheet-like filter material having a three dimension mesh-like skeleton and a large number of continuous pores 1. A large number of front/back through holes 4 are provided on the sheet-like filter material and a plurality of sheet-like filter materials are superposed/retained at gaps with each other. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |