| 摘要 |
PROBLEM TO BE SOLVED: To provide a susceptor for deposition process equipment where an insulating ceramic material is isolated from the ambient environment, and its standard resistance value can be fixedly maintained. SOLUTION: The susceptor for deposition process equipment includes a heater. The heater includes: a lead line exposed to the ambient environment; a heating wire connected to the lead line; a sheath formed so as to surround the heating wire; a ceramic material filled into the sheath; and an isolation layer formed on the opposite ends of the sheath. COPYRIGHT: (C)2005,JPO&NCIPI
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