| 摘要 |
A multi-chamber system includes an index station at which one or more substrate cassettes are placed, a transfer passageway having one end adjacent the index station, at least one process chamber disposed alongside the transfer passageway, and at least one substrate transfer robot disposed in the transfer passageway for receiving a substrate from the index station and by which the substrate is transferred to each process chamber. The multi-chamber system has a minimal footprint. Furthermore, the system can be easily expanded. In addition, the substrate transfer robot(s) may have a blade including two substrate supports so that the time required for moving a substrate through the system is minimized.
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