| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve an electrode structure capable of flexibly responding to the size of a processed object in a plasma treatment device. <P>SOLUTION: Electrode modules 10 are set in the plural number at right and left in parallel. Each electrode module includes a plurality of electrode members 11, 12 set in parallel at right and left, and a gap 10a as a plasmolyzation space is formed between each two adjacent electrode members. In the two adjacent electrode modules at right and left, a coalescence electrode member 12X is structured by uniting an electrode member 12R at a right end of the left one and an electrode member 12L at a left end of the right one. The coalescence electrode member has the same thickness with the other electrode members 11, 12M, and all the electrode members of the right and left electrode modules are at the same pitch. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
