| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for insulating a charged particle accelerator and high-voltage generating circuit, by which the withstanding voltage between the high-voltage generating section and a sealed vessel is improved, while avoiding an enlargement of an apparatus. SOLUTION: In an ion implanting apparatus 10, compressed dry air is filled inside a high-pressure tank (sealed vessel) 18, in order to carry out electrical insulation between the high-voltage tank (sealed vessel) 18 constituting the electrically-charged particle accelerator 30 and the high-voltage generating sections (high voltage terminal 20, high-voltage generating device 21). As the compressed dry air, air having humidity of 55% or lower under pressure of gauge pressure 0.3 MPa is used. Thus, an improvement in the withstanding voltage is attained while improving the maintainability. COPYRIGHT: (C)2005,JPO&NCIPI
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