摘要 |
PROBLEM TO BE SOLVED: To provide an insertion gas sensor manufactured at a low cost, surely introducing a gas to the sensor and accurately measuring the gas. SOLUTION: An inlet pipe 3 is inserted from a mounting hole on a wall 5 of a duct 4 into an internal space. A gas inlet hole 6 is formed at a tip of the inlet pipe. An gas exhaustion hole 7 is formed on a face opposite near the wall. The detection sensor 2 is provided at a tip of a sensor substrate 8 inserted into the pipe and disposed in the vicinity of the gas exhausting hole closer to the wall than to the gas exhaustion hole in the pipe. The gas is transmitted to the detection sensor, by utilizing flow force of the gas entering from the gas inlet hole 6, and accurate measurements can be conducted. Since there is no need for lengthening the sensor substrate 8 so that the detection sensor at the tip of the introduction pipe and the length of the sensor substrate 8 can be reduced, the manufacturing cost can be reduced. COPYRIGHT: (C)2005,JPO&NCIPI
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