| 发明名称 |
Micro-mirrors with flexure springs |
| 摘要 |
A micro-mirror device includes a micro-mirror and a flexure spring supporting the micro-mirror. The flexure spring is configured to store potential energy during movement of the micro-mirror that is released as kinetic energy to drive movement of the micro-mirror when the micro-mirror is re-oriented.
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| 申请公布号 |
US2005111069(A1) |
申请公布日期 |
2005.05.26 |
| 申请号 |
US20030719222 |
申请日期 |
2003.11.21 |
| 申请人 |
JILANI ADEL;GUO JAMES;FAASE KENNETH |
发明人 |
JILANI ADEL;GUO JAMES;FAASE KENNETH |
| 分类号 |
G02B26/08;(IPC1-7):G02F1/03;G02F1/07 |
主分类号 |
G02B26/08 |
| 代理机构 |
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代理人 |
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