发明名称 |
METHOD FOR MANUFACTURING COMPOUND SEMICONDUCTOR EPITAXIAL SUBSTRATE |
摘要 |
<p>Disclosed is a method for manufacturing a compound semiconductor epitaxial substrate with few hollow defects. The method for manufacturing a compound semiconductor epitaxial substrate comprises a step for epitaxially growing an InGaAs layer on an InP single crystal substrate or on a layer lattice-matched to the InP single crystal substrate at a V/III ratio of 10-100, a growth temperature of 630-700˚C and a growth rate of 0.6-2 mum/h.</p> |
申请公布号 |
WO2005048332(A1) |
申请公布日期 |
2005.05.26 |
申请号 |
WO2004JP16905 |
申请日期 |
2004.11.08 |
申请人 |
SUMITOMO CHEMICAL COMPANY, LIMITED;KOHIRO, KENJI;TAKADA, TOMOYUKI |
发明人 |
KOHIRO, KENJI |
分类号 |
C23C16/30;C30B25/02;C30B29/40;H01L21/205;(IPC1-7):H01L21/205 |
主分类号 |
C23C16/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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