| 摘要 |
PROBLEM TO BE SOLVED: To provide a low-cost transfer apparatus that has a buffer, and can convert the direction of an article between a conveyor and a load port. SOLUTION: The buffer 16 is provided at the same level as a conveyor system 4 on both the sides of the load port 14 of a processor 12; a transfer device 18 carries cassettes between the conveyor and the buffer and converts the direction of the cassettes; and a hoist-type loader 30 performs transfer between the buffer 16 and the load port 14. COPYRIGHT: (C)2005,JPO&NCIPI
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