发明名称 MINIMISATION OF LIGHT LOSSES AND ELECTRONIC SHIELDING ON INTEGRATED PHOTODIODES
摘要 The invention relates to an integrated circuit according to CMOS/BiCMOS technology and a method for producing the same. At least one integrated, photosensitive component and one electrical shield are provided, a second layer system (2; 3, 4) being applied to a photosensitive area (1) of the circuit (A) to be protected against an (unwanted) electrical coupling, said second layer system comprising a last layer (3) of a first sealing passivation layer system (5) according to the process, and a subsequent, transparent, electroconductive layer (4). Said layers have adjusted individual thicknesses (d3, d4) in order to obtain an optical thickness of the second layer system (2) having maximum transparency with a reduced thickness tolerance influence.
申请公布号 EP1532691(A2) 申请公布日期 2005.05.25
申请号 EP20030753262 申请日期 2003.08.29
申请人 X-FAB SEMICONDUCTOR FOUNDRIES AG 发明人 BACH, KONRAD
分类号 H01L27/146;H01L31/00;H01L31/0216;(IPC1-7):H01L31/021 主分类号 H01L27/146
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