Verfahren und Vorrichtung zum Auftragen einer Ätz-Stoppschicht,申请号DE19986029796-传众专利搜索

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发明名称	Verfahren und Vorrichtung zum Auftragen einer Ätz-Stoppschicht
摘要
申请公布号	DE69829796(D1)	申请公布日期	2005.05.25
申请号	DE19986029796	申请日期	1998.04.30
申请人	APPLIED MATERIALS, INC.	发明人	HUANG, JUDY H.;CHEUNG, DAVID;YAU, WAI-FAN;YANG, CHAN-LON
分类号	H01L21/302;C23C16/30;C23C16/34;C23C16/52;G03F7/09;H01L21/027;H01L21/3065;H01L21/311;H01L21/316;H01L21/3205;H01L21/768;(IPC1-7):H01L21/027;C23C16/50;G02B1/11	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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