分类号 |
H01L21/765;H01L27/08;A44C7/00;H01L21/00;H01L21/28;H01L21/3205;H01L21/336;H01L21/4763;H01L21/82;H01L21/8234;H01L21/8238;H01L21/8242;H01L21/84;H01L27/088;H01L27/10;H01L27/105;H01L27/108;H01L29/10;H01L29/49;H01L29/78;H01L31/062;H01L31/113;(IPC1-7):H01L21/765 |
主分类号 |
H01L21/765 |