| 摘要 |
A semiconductor device miniaturizing the plane sizes of memory cells and a peripheral circuit part for a logic circuit and reducing wiring resistance and ensuring the degree of freedom in layout of wires on an interlayer isolation film. The semiconductor device comprises an active region included in a transistor formed on a semiconductor substrate, a wire formed on the semiconductor substrate, an interlayer isolation film covering the active region and the wire and a plug wire having a shape overlapping with both of the wire and the active region in plane, and the plug wire electrically connects the wire and the active region with each other. |
