Interferometer sensor e.g. for quality control of prefabricated parts, sensor and electronics are integrated in sensor housing with optics having special arrangement of polarization-optical components and four image sensors

摘要

The sensor and electronics are integrated in a sensor housing. Optics has a special arrangement of polarization-optical components and four image sensors, which are controlled by a signal processor. The four out of phase pictures are produced by a special arrangement of polarizing optical components and diffraction optical elements.