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发明名称
摘要
申请公布号
JP3652255(B2)
申请公布日期
2005.05.25
申请号
JP20010019158
申请日期
2001.01.26
申请人
发明人
分类号
H01L23/02;H01L23/04;(IPC1-7):H01L23/02
主分类号
H01L23/02
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