发明名称 |
Mehrachsiger monolithischer Beschleunigungssensor |
摘要 |
A multi-axial monolithic acceleration sensor has the following features. The acceleration sensor consists of plural individual sensors with respectively a main sensitivity axis arranged on a common substrate. Each individual sensor is rotatably moveably suspended on two torsion spring elements and has a seismic mass with a center of gravity. Each individual sensor has components that measure the deflection of the seismic mass. The acceleration sensor preferably consists of at least three identical individual sensors. Each individual sensor is suspended eccentrically relative to its center of gravity and is rotated by 90�, 180� or 270� relative to the other individual sensors. |
申请公布号 |
DE10393276(D2) |
申请公布日期 |
2005.05.25 |
申请号 |
DE2003193276 |
申请日期 |
2003.06.10 |
申请人 |
EADS DEUTSCHLAND GMBH;CONTI TEMIC MICROELECTRONIC GMBH |
发明人 |
KAPSER, KONRAD;PRECHTEL, ULRICH;SEIDEL, HELMUT |
分类号 |
G01P15/125;G01P15/18;(IPC1-7):G01P15/18 |
主分类号 |
G01P15/125 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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