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发明名称
摘要
申请公布号
JP3651344(B2)
申请公布日期
2005.05.25
申请号
JP20000026369
申请日期
2000.02.03
申请人
发明人
分类号
H01L21/76;H01L21/02;H01L21/301;H01L21/762;(IPC1-7):H01L21/76
主分类号
H01L21/76
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