发明名称 SCHLEIFBEARBEITUNGSVORRICHTUNG UND VERFAHREN UNTER ANWENDUNG EINES KODIERTEN SCHLEIFMITTELS
摘要 <p>An apparatus and method for abrasively processing an article involves the use of an abrasive product provided with a machine discernable pattern representative of information of varying types. The pattern is read while the abrasive product moves relative to the article, and is used to control the movement of the abrasive product relative to the article. The pattern may include one or more of a machine discernable electrical characteristic, optical characteristic, topographic characteristic or magnetic characteristic. Reading the pattern may involve one or more of electrically, optically, mechanically or magnetically reading the machine discernable pattern provided on the abrasive product. The pattern may include one or more of indicia, protrusions, depressions, holes, voids, color or pigment variations, bar codes, magnetic transitions or periodic markings. The pattern may include one or more of indexing information, servo information, alignment information or abrasive product identification information. Closed-loop servo control of abrasive product movement may be effected using the servo/indexing pattern information. The abrasive product may constitute a movable pad and an abrasive slurry. The pad may be moved in a controlled manner relative to the article such that the pad and the abrasive slurry abrasively contact the article. The pattern provided on the pad may be read subsequent to a cleaning operation. An information system may be used to store various types of data derived, in part, from use of the abrasive product pattern information. The stored data may be used for a variety of identification, tracking, accounting, inventory, handling, and statistical purposes.</p>
申请公布号 DE69924884(D1) 申请公布日期 2005.05.25
申请号 DE1999624884 申请日期 1999.09.20
申请人 3M INNOVATIVE PROPERTIES CO., ST. PAUL 发明人 KUMMETH, R.;MUILENBURG, J.;FORSBERG, B.;STREIFEL, J.;PENDERGRASS, B.
分类号 B24B49/10;B24B37/20;B24B49/00;B24B49/12;B24D11/00;B24D13/12;H01L21/304;(IPC1-7):B24B37/04;G05B19/12;G05B19/409 主分类号 B24B49/10
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