发明名称 |
METHOD OF MAKING MICROELECTRONIC SPRING CONTACT ARRAY |
摘要 |
A method of making a microelectronic spring contact array comprises forming a plurality of spring contacts on a sacrificial substrate and then releasing the spring contacts from the sacrificial substrate. Each of the spring contacts has an elongated beam having a base end. The method of making the array includes attaching the spring contacts at their base ends to a base substrate after they have been released entirely from the sacrificial substrate, so that each contact extends from the base substrate to a distal end of its beams. The distal ends are aligned with a predetermined array of tip positions. In an embodiment of the invention, the spring contacts are formed by patterning contours of the spring contacts in a sacrificial layer on the sacrificial substrate. The walls of patterned recesses in the sacrificial layer define side profiles of the spring contacts, and a conductive material is deposited in the recesses to form the elongated beams of the spring contacts. |
申请公布号 |
EP1532456(A1) |
申请公布日期 |
2005.05.25 |
申请号 |
EP20030765632 |
申请日期 |
2003.07.15 |
申请人 |
FORMFACTOR, INC. |
发明人 |
ELDRIDGE, BENJAMIN, N.;MATHIEU, GAETAN, L.;REYNOLDS, CARL, V. |
分类号 |
G01R31/26;G01R1/067;G01R1/073;G01R3/00;(IPC1-7):G01R3/00 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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