Removal of sulfur-containing impurities from volatile metal hydrides
摘要
Method for the purification of a volatile metal hydride comprising obtaining a volatile metal hydride feed containing one or more acidic impurities, one of which is a sulfur-containing impurity; contacting the feed with an alkaline material and reacting at least a portion of the sulfur-containing impurity with the alkaline material to remove a portion of the sulfur-containing impurity from the feed and provide an intermediate purified material; and contacting the intermediate purified product with an adsorbent material to remove at least a portion of the sulfur-containing impurity from the intermediate purified material and provide a purified volatile metal hydride product. <IMAGE>
申请公布号
EP1533272(A1)
申请公布日期
2005.05.25
申请号
EP20040027072
申请日期
2004.11.15
申请人
AIR PRODUCTS AND CHEMICALS, INC.
发明人
AGARWAL, RAJIV K.;RYALS, GEORGE L.;CAO, WEI;CIRUCCI, JOHN FREDERICK;APOLLO, ROBERT W.;MCNESBY, DANIEL