Mechatronic system, e.g. for machine and system construction, has at least one modifier layer of material with coefficient of thermal expansion between those of metal and ceramic arranged between ceramic substrate and metallic surface

摘要

The system has a ceramic substrate (1) in which electronic or microsystems technology components, conducting tracks and/or micro channels are integrated and at least one metallic surface (2), whereby at least one modifier layer (3) of a material with a coefficient of thermal expansion between the metal and ceramic is arranged between the ceramic substrate and the metallic surface.