发明名称 |
Plasma process and apparatus |
摘要 |
An apparatus and process for enhancing the ignition of a gas to form a plasma in a plasma tool. The apparatus and process includes the use of a plasma tube to locally enhance the applied electric field so that plasma can be initiated at higher pressures, at lower electric fields, and/or in otherwise difficult gases to ignite. The plasma tube includes at least one conductive fiber secured to the tube. A process for enhancing the local electric field includes coupling the plasma tube to an energy source such as microwave energy, radiofrequency energy, or a combination comprising at least one of the foregoing energy sources.
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申请公布号 |
US6897615(B2) |
申请公布日期 |
2005.05.24 |
申请号 |
US20010004523 |
申请日期 |
2001.11.01 |
申请人 |
AXCELIS TECHNOLOGIES, INC. |
发明人 |
JANOS ALAN C.;FERRIS DAVID;BERRY IVAN;URY MICHAEL G. |
分类号 |
H01J61/54;H01J65/04;(IPC1-7):H01J7/24;H05B32/26 |
主分类号 |
H01J61/54 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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