发明名称 |
Ceramic heater for semiconductor manufacturing/testing apparatus |
摘要 |
A ceramic beater for a semiconductor producing/examining device having a resistance heating element superior in adhesion to a substrate. The ceramic heater includes a ceramic substrate and a resistance heating element formed on the surface of the ceramic substrate. Further, irregularities are formed on the side face of the resistance heating element.
|
申请公布号 |
US6897414(B2) |
申请公布日期 |
2005.05.24 |
申请号 |
US20020069511 |
申请日期 |
2002.06.24 |
申请人 |
IBIDEN CO., LTD. |
发明人 |
ITO YASUTAKA;MASHIMA KAZUTAKA |
分类号 |
H01L21/00;H05B3/14;H05B3/26;(IPC1-7):H05B3/68 |
主分类号 |
H01L21/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|